Neblux Knowledge Graph
MEMS (Microelectromechanical Systems)
Microelectromechanical systems (MEMS) use microfabrication to combine mechanical structures with electronic functions in miniature devices for sensing, actuation, and signal processing.
Overview
Operating at dimensions from one to hundreds of micrometers, MEMS devices interact with physical phenomena such as motion, pressure, temperature, chemical concentration, and light. Fabrication techniques including bulk micromachining, surface micromachining, and high-aspect-ratio lithography provide distinct balances between structural complexity and manufacturing constraints.
Why it matters
MEMS technology enables batch fabrication of miniaturized transducers, supporting applications such as inertial sensors in mobile devices, pressure sensors in automotive systems, microphones in acoustic instruments, and micromirror arrays in optical displays.
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